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Scanning Electron Microscope (SEM)
Li-ion Battery Laboratory Testing Equipment
Scanning Electron Microscope (SEM).png

Scanning Electron Microscope (SEM)

A high-performance, widely applicable general-purpose tungsten filament scanning electron microscope (SEM). It features excellent imaging quality, compatibility with low vacuum mode, and the ability to obtain high-resolution images across different fields of view. With a large depth of field, it provides images with a strong three-dimensional effect.

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    Parameter

    Electron Optical System

    Electron Gun Type

    Pre-centered tungsten filament electron gun

    Resolution

    High Vacuum

    5nm@10kV(SE)

    3nm@30kV(SE)

    8nm@3kV(SE)

    Magnification

    1–300,000× (basic magnification)

    1–16× (optical magnification)

    Acceleration Voltage

    0.2kV~30 kV

    Imaging System

    Detector

    Secondary electron detector (ETD)

    Backscattered electron detector

    Low vacuum secondary electron detector

    Energy dispersive spectroscopy (EDS), etc.

    Image Storage Format

    TIFF, JPG, BMP, PNG, up to 48k*32k

    Configuration

    Optical navigation function, equipped with horizontal CCD camera and vertical camera

    Vacuum System

    Vacuum Mode

    High Vacuum

    Better than 5×10⁻⁴ Pa

    Low Vacuum

    5~1000 Pa

    Control Method

    Fully automatic control

    Sample Chamber

    Camera

    Optical navigation

    Sample chamber monitoring

    Sample Stage Configuration

    5-axis fully automated sample stage with fully enclosed internal motorized design

    Travel Range

    X：120 mm

    Y：115 mm

    Z：50 mm

    R (Rotation): 360° continuously adjustable

    T：-10°~+90°

    Sample Chamber Capacity

    Width: 340 mm

    Height: 274 mm

    Depth: 295 mm

    Maximum Sample Size

    Diameter: 270 mm

    Height: 53 mm